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Innovation Resources Metrology Capabilities
 
METROLOGY CAPABILITIES

SOLAR CAPABILITIES

DESPATCH SOLAR TEST CAPABILITIES: METROLOGY
Available front end of the line equipment located in the Innovation Center vs what customers use in their own facilities.
Process Innovation Center Customer
Scale   X
Optical Microscope (Visual)   X
Goniometer (Surface Energy)   X
Sherrescan (Sheet Resistance Test) X X
MFM (Phosphorus Concentration) X X
Photoconductance Lifetime Tester X X
Sinton Suns-Voc X X
I-V Testing (Cell Efficiency) X X
SIMS (Emitter Depth & Profile) X X

   
SheRRescan SheRRescan GUI AND OUTPUT
   
  • SheRRescan measures sheet resistance of wafers after the emitter
    diffusion step using a four-point probe
  • This predicts the uniformity of dopant application and to some degree the quality of the diffusion step
  • Graphic sheet resistance map of a wafer
  • The higher the sheet resistance, the high the efficiecny of the cell
  • Statistical averages and deviations outputed on the right-hand side
   
 
   
   
SINTON TOOLS  
   

       
Lifetime Tester Voc Tester Goniometer Microscope
  • Key performance evaluation and prediction tools for
    wafer quality
  • The goniometer is used to determine the hydrophilic
    state of the cell by measuring the angle of a drop of water.
   
   
I-V TESTER  
   
 
   
  • Key cell efficiency and electrical characteristics are measured and evaluated