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Innovation Resources Back End of Line Processing Capabilities
 
BACK END OF LINE PROCESSING CAPABILITIES
   
Si SOLAR BACK END OF LINE PROCESSING CAPABILITIES  

SOLAR CAPABILITIES



DESPATCH SOLAR TEST CAPABILITIES: BACK END OF LINE
Available back end of the line equipment located in the Innovation Center vs what customers use in their own facilities.
 
Process Innovation Center Customer
Print Ag   X X
Dry   X X
Print Aluminum   X X
Dry X X
Fire X X
Rapid Thermal Shock - In-Line X  
Laser Edge Isolation   X
 
FIRING FURNACE AND DRYER  
Industry Standard CF-Series Metallization Furnace
  • Tight thermal control
  • High throughput
  • High yield - no breakage
  • Profile matching
   
ULTRAFLEX™ DRYING AND FIRING FURNACE  
  • Next generation technology
  • Microzone Technology
  • Rapid thermal ramping up to 175°C/sec
  • Enhanced cooling up to 250°C/sec
  • Wavelength tuned firing process
  • Infinite profile flexibility
   
   
RAPID THERMAL SHOCK (DEBOW)  
IL-RTS Rapid Thermal Shock
  • This revolutionary tool features a simple, in-line process that applies a low temperature thermal spike to solar cells, eliminating the need for low-bow paste
  • Removes wafer bow without decreasing efficiency
  • Customers can test wafers to see if the bow
    can be reduced
   
AG AND AL SCREEN PRINTER  
AG and AL Screen Printer
  • A very flexible production printer mounted in a rectangular frame with a reciprocating substrate carriage
  • Small production scale, 300-400 wafers/hour